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Gas phase mass flow controller

The mass flow controller (MFC) is used to precisely measure and control the mass flow of a gas, and is widely used in analytical measuring instruments. The quality of its performance index directly affects the precision and accuracy of gas flow control, and then affects the accuracy and reliability of the overall analysis results.


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    Corrosion resistant material to avoid corrosion of flowmeter by corrosive gas



    Super fast response, corresponding speed less than 100ms



    Built in temperature compensation, more accurate flow control



    Fully sealed gas circuit system to avoid dangerous gas leakage



    Multiple electrical interfaces to meet the needs of different users


    Model

    Full-scale flow standard

    Flow control range

    Flow measurement range

    MFC-300

    MFC-600

    3 SLPM

    6 SLPM

    5%~100% F.S.

    0%~100% F.S.

    Accuracy

    Repeatability

    Response   time

    ±1%F.S.

    ±0.5%F.S.

    <100ms

    Working   pressure

    Leak   rate

    Sealing material

    0.05Mpa~0.2Mpa

    1×10-9 atm?cc/sec He

    Viton, Teflon

    Rated operating voltage / current

    Maximum power consumption

    15VDC/500mA

    <5W

    Numeric communication

    RS232  DB9 pin (Male)

    Analog input / output

    0-5.00V DC


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